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high performance, wide bandwidth accelerometer adxl001 rev. a information furnished by analog devices is believed to be accurate and reliable. however, no responsibility is assumed by analog devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. specifications subject to change without notice. no license is granted by implication or otherwise under any patent or patent rights of analog devices. trademarks and registered trademarks are the property of their respective owners. one technology way, p.o. box 9106, norwood, ma 02062-9106, u.s.a. tel: 781.329.4700 www.analog.com fax: 781.461.3113 ?2010 analog devices, inc. all rights reserved. features high performance accelerometer 70 g , 250 g , and 500 g wideband ranges available 22 khz resonant frequency structure high linearity: 0.2% of full scale low noise: 4 m g /hz sensitive axis in the plane of the chip frequency response down to dc full differential signal processing high resistance to emi/rfi complete electromechanical self-test output ratiometric to supply velocity preservation during acceleration input overload low power consumption: 2.5 ma typical 8-terminal, hermetic ceramic, lcc package applications vibration monitoring shock detection sports diagnostic equipment medical instrumentation industrial monitoring general description the adxl001 is a major advance over previous generations of accelerometers providing high performance and wide bandwidth. this part is ideal for industrial, medical, and military applications where wide bandwidth, small size, low power, and robust performance are essential. using the analog devices, inc. proprietary fifth-generation i mems? process enables the adxl001 to provide the desired dynamic range that extends from 70 g to 500 g in combin- ation with 22 khz of bandwidth. the accelerometer output channel passes through a wide bandwidth differential-to-single- ended converter, which allows access to the full mechanical performance of the sensor. the part can operate on voltage supplies from 3.3 v to 5 v. the adxl001 also has a self-test (st) pin that can be asserted to verify the full electromechanical signal chain for the accelerometer channel. the adxl001 is available in the industry-standard 8-terminal lcc and is rated to work over the extended industrial temperature range (?40c to +125c). ?15 ?12 ?9 ?6 ?3 0 3 6 9 12 15 1 10 100 1k 10k 100k response (db) frequency (hz) 07510-102 figure 1. sensor frequency response functional block diagram timing generator adxl001 x out differential sensor mod demod amp self-test st com output amplifier v s v dd v dd2 07510-001 figure 2.
adxl001 rev. a | page 2 of 16 table of contents features .............................................................................................. 1 ? applications ....................................................................................... 1 ? general description ......................................................................... 1 ? functional block diagram .............................................................. 1 ? revision history ............................................................................... 2 ? specifications ..................................................................................... 3 ? specifications for 3.3 v operation ............................................. 3 ? specifications for 5 v operation ................................................ 4 ? recommended soldering profile ............................................... 5 ? absolute maximum ratings ............................................................ 6 ? esd caution .................................................................................. 6 ? pin configuration and function descriptions ............................. 7 ? typical performance characteristics ............................................. 8 ? theory of operation ...................................................................... 11 ? design principles ........................................................................ 11 ? mechanical sensor ..................................................................... 11 ? applications information .............................................................. 12 ? application circuit ..................................................................... 12 ? self-test ....................................................................................... 12 ? acceleration sensitive axis ....................................................... 12 ? operating voltages other than 5 v ........................................ 12 ? layout, grounding, and bypassing considerations .................. 13 ? clock frequency supply response .......................................... 13 ? power supply decoupling ......................................................... 13 ? electromagnetic interference ................................................... 13 ? outline dimensions ....................................................................... 14 ? ordering guide .......................................................................... 14 ? revision history 2/10rev. 0 to rev. a added -250 and -500 models ............................................ universal changes to table 1 ............................................................................ 3 changes to table 2 ............................................................................ 4 added figure 9 through figure 18 ................................................. 8 changes to ordering guide .......................................................... 14 1/09revision 0: initial version
adxl001 rev. a | page 3 of 16 specifications specifications for 3.3 v operation t a = ?40c to +125c, v s = 3.3 v 5% dc, acceleration = 0 g , unless otherwise noted. table 1. adxl001-70 adxl001-250 adxl001-500 parameter conditions min typ max min typ max min typ max unit sensor nonlinearity 0.2 2 0.2 2 0.2 2 % cross-axis sensitivity includes package alignment 2 2 2 % resonant frequency 22 22 22 khz quality factor 2.5 2.5 2.5 sensitivity full-scale range i out 100 a ?70 +70 ?250 +250 ?500 +500 g sensitivity 100 hz 16.0 4.4 2.2 mv/ g offset ratiometric zero- g output 1.35 1.65 1.95 1.35 1.65 1.95 1.35 1.65 1.95 v noise noise 10 hz to 400 hz 85 95 105 m g rms noise density 10 hz to 400 hz 3.3 3.65 4.25 m g /hz frequency response ?3 db frequency 32 32 32 khz ?3 db frequency drift over temperature 2 2 2 % self-test output voltage change 400 125 62 mv logic input high 2.1 2.1 2.1 v logic input low 0.66 0.66 0.66 v input resistance to ground 30 50 30 50 30 50 k output amplifier output swing i out = 100 a 0.2 v s ? 0.2 0.2 v s ? 0.2 0.2 v s ? 0.2 v capacitive load 1000 1000 1000 pf psrr (cfsr) dc to 1 mhz 0.9 0.9 0.9 v/v power supply (v s ) functional range 3.135 6 3.135 6 3.135 6 v i supply 2.5 5 2.5 5 2.5 5 ma turn-on time 10 10 10 ms
adxl001 rev. a | page 4 of 16 specifications for 5 v operation t a = -40c to +125c, v s = 5 v 5% dc, acceleration = 0 g , unless otherwise noted. table 2. adxl001-70 adxl001-250 adxl001-500 parameter conditions min typ max min typ max min typ max unit sensor nonlinearity 0.2 2 0.2 2 0.2 2 % cross-axis sensitivity includes package alignment 2 2 2 % resonant frequency 22 22 22 khz quality factor 2.5 2.5 2.5 sensitivity full-scale range i out 100 a ?70 +70 ?250 +250 ?500 +500 g sensitivity 100 hz 24.2 6.7 3.3 mv/ g offset ratiometric zero- g output 2.00 2.5 3.00 2.00 2.5 3.00 2.00 2.5 3.00 v noise noise 10 hz to 400 hz 55 60 70 m g rms noise density 10 hz to 400 hz 2.15 2.35 2.76 m g /hz frequency response ?3 db frequency 32 32 32 khz ?3 db frequency drift over temperature 2 2 2 % self-test output voltage change 1435 445 217 mv logic input high 3.3 3.3 3.3 v logic input low 0.66 0.66 0.66 v input resistance to ground 30 50 30 50 30 50 k output amplifier output swing i out = 100 a 0.2 v s ? 0.2 0.2 v s ? 0.2 0.2 v s ? 0.2 v capacitive load 1000 1000 1000 pf psrr (cfsr) dc to 1 mhz 0.9 0.9 0.9 v/v power supply (v s ) functional range 3.135 6 3.135 6 3.135 6 v i supply 4.5 9 4.5 9 4.5 9 ma turn-on time 10 10 10 ms
adxl001 rev. a | page 5 of 16 recommended soldering profile table 3. soldering profile parameters profile feature sn63/pb37 pb-free average ramp rate (t l to t p ) 3c/sec maximum 3c/sec maximum preheat minimum temperature (t smin ) 100c 150c maximum temperature (t smax ) 150c 200c time (t smin to t smax ), t s 60 sec to 120 sec 60 sec to 150 sec t smax to t l ramp-up rate 3c/sec 3c/sec time maintained above liquidous (t l ) liquidous temperature (t l ) 183c 217c liquidous time (t l ) 60 sec to 150 sec 60 sec to 150 sec peak temperature (t p ) 240c + 0c/?5c 260c + 0c/?5c time within 5c of actual peak temperature (t p ) 10 sec to 30 sec 20 sec to 40 sec ramp-down rate 6c/sec maximum 6c/sec maximum time 25c to peak temperature (t peak ) 6 minute maximum 8 minute maximum soldering profile diagram t p t l t peak t s preheat critical zone t l to t p temperature (t) time (t) ramp-down ramp-up t smin t smax t p t l 07510-022 figure 3. soldering profile diagram
adxl001 rev. a | page 6 of 16 absolute maximum ratings table 4. parameter rating acceleration (any axis, unpowered and powered) 4000 g supply voltage, v s ?0.3 v to +7.0 v output short-circuit duration (v out to gnd) indefinite storage temperature range ?65c to +150c operating temperature range ?55c to +125c soldering temperature (soldering, 10 sec) 245c drops onto hard surfaces can cause shocks of greater than 4000 g and can exceed the absolute maximum rating of the device. exercise care during handling to avoid damage. esd caution stresses above those listed under absolute maximum ratings may cause permanent damage to the device. this is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. exposure to absolute maximum rating conditions for extended periods may affect device reliability.
adxl001 rev. a | page 7 of 16 pin configuration and fu nction descriptions 1 2 3 4 8 5 6 7 dnc dnc com v dd2 st adxl001 top view (not to scale) dnc = do not connect v dd x out dnc 07510-004 figure 4. pin configuration table 5. pin function descriptions pin no. mnemonic description 1, 2, 5 dnc do not connect. 3 com common. 4 st self-test control (logic input). 6 x out x-axis acceleration output. 7 v dd 3.135 v to 6 v. connect to v dd2 . 8 v dd2 3.135 v to 6 v. connect to v dd .
adxl001 rev. a | page 8 of 16 typical performance characteristics v s = 3.3 v, t a = 25c, unless otherwise noted. 07510-005 percent of population volts 10 0 20 30 40 50 60 ?0.07 ?0.06 ?0.05 ?0.04 ?0.03 ?0.02 ?0.01 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 figure 5. zero-g bias deviation from ideal 07510-006 percent of population volts 5 0 10 15 25 35 45 20 30 40 ?0.07 ?0.06 ?0.05 ?0.04 ?0.03 ?0.02 ?0.01 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 figure 6. zero-g bias deviation from ideal (t a = 125c) 07510-007 percent of population (mv/ g) 5 0 10 15 20 25 15.2 15.3 15.4 15.5 15.6 15.7 15.8 16.0 15.9 16.1 16.2 16.3 16.4 16.6 16.8 16.5 16.7 figure 7. adxl001-70, sensitivity distribution 07510-008 percent of population (mv/ g) 5 0 10 15 20 25 15.2 15.3 15.4 15.5 15.6 15.7 15.8 16.0 15.9 16.1 16.2 16.3 16.4 16.6 16.8 16.5 16.7 figure 8. adxl001-70, sensitivity distribution (t a = 125c) 07510-024 percent of population 5 0 10 20 25 35 15 30 4.30 4.32 4.34 4.36 4.38 4.40 4.42 4.44 4.46 4.48 4.50 4.52 4.54 (mv/ g) figure 9: adxl001-250, sensitivity distribution 07510-025 percent of population 5 0 10 20 25 15 30 4.30 4.32 4.34 4.36 4.38 4.40 4.42 4.44 4.46 4.48 4.50 4.52 4.56 4.54 (mv/ g) figure 10: adxl001-250, sensitivity distribution (t a = 125c)
adxl001 rev. a | page 9 of 16 07510-026 percent of population 5 0 10 20 25 15 30 (mv/ g) 2.17 2.18 2.19 2.20 2.21 2.22 2.23 2.24 2.25 2.26 2.27 figure 11. adxl001-500, sensitivity distribution 07510-027 percent of population 5 0 10 20 25 15 30 (mv/ g) 2.17 2.18 2.19 2.20 2.21 2.22 2.23 2.24 2.25 2.26 2.28 2.27 2.29 figure 12. adxl001-500, sensitivity distribution (t a = 125c) 07510-009 percent of population (mv) 5 0 10 15 20 25 360 365 370 375 380 385 390 400 395 405 410 415 420 430 440 425 435 figure 13. adxl001-70, self-test delta 07510-028 percent of population (mv) 5 0 10 15 25 20 30 110 112 114 116 118 120 122 126 124 128 130 132 134 138 142 136 140 figure 14. adxl001-250, self-test delta 07510-029 percent of population (mv) 5 0 10 15 30 20 40 25 35 55 56 57 58 59 60 61 62 63 64 65 66 67 figure 15. adxl001-500, self-test delta 07510-010 percent of population (ma) 5 0 10 15 25 20 30 2.000 2.075 2.150 2.225 2.300 2.375 2.450 2.600 2.525 2.675 2.750 2.825 2.900 figure 16. i supply distribution
adxl001 rev. a | page 10 of 16 07510-011 percent of population (ma) 5 0 10 15 35 25 30 20 40 2.100 2.175 2.250 2.325 2.400 2.475 2.550 2.700 2.625 2.775 2.850 2.925 3.000 figure 17. i supply at 125c 07510-012 ch1 500mv b w ch2 500mv b w m10.0s a ch2 1.38v t 42.80% figure 18. turn-on characteristic (10 s per div)
adxl001 rev. a | page 11 of 16 theory of operation design principles the adxl001 accelerometer provides a fully differential sensor structure and circuit path for excellent resistance to emi/rfi interference. this latest generation soi mems device takes advantage of mechanically coupled but electrically isolated differential sensing cells. this improves sensor performance and size because a single proof mass generates the fully differential signal. the sensor signal conditioning also uses electrical feedback with zero-force feedback for improved accuracy and stability. this force feedback cancels out the electrostatic forces contributed by the sensor circuitry. figure 19 is a simplified view of one of the differential sensor cell blocks. each sensor block includes several differential capacitor unit cells. each cell is composed of fixed plates attached to the device layer and movable plates attached to the sensor frame. displacement of the sensor frame changes the differential capacitance. on-chip circuitry measures the capacitive change. mechanical sensor the adxl001 is built using the analog devices soi mems sensor process. the sensor device is micromachined in-plane in the soi device layer. trench isolation is used to electrically isolate, but mechanically couple, the differential sensing elements. single-crystal silicon springs suspend the structure over the handle wafer and provide resistance against acceleration forces. unit sensing cell movable frame fixed plates unit forcing cell anchor moving plate plate capacitors acceleration anchor 07510-019 figure 19. simplified view of sensor under acceleration
adxl001 rev. a | page 12 of 16 applications information application circuit figure 20 shows the standard application circuit for the adxl001. note that v dd and v dd2 should always be connected together. the output is shown connected to a 1000 pf output capacitor for improved emi performance and can be connected directly to an adc input. use standard best practices for interfacing with an adc and do not omit an appropriate antialiasing filter. 7 6 5 4 8 3 2 1 dnc dnc com v dd2 st st top view (not to scale) v dd x out dnc adxl001 c vdd 0.1f v s x out c out 1nf dnc = do not connect 07510-023 figure 20. application circuit self-test the fixed fingers in the forcing cells are normally kept at the same potential as that of the movable frame. when the digital self-test input is activated, the adxl001 changes the voltage on the fixed fingers in these forcing cells on one side of the moving plate. this potential creates an attractive electrostatic force, causing the sensor to move toward those fixed fingers. the entire signal channel is active; therefore, the sensor displacement causes a change in x out . the adxl001 self-test function verifies proper operation of the sensor, interface electronics, and accelerometer channel electronics. do not expose the st pin to voltages greater than v s + 0.3 v. if this cannot be guaranteed due to the system design (for instance, if there are multiple supply voltages), then a low v f clamping diode between st and v s is recommended. acceleration sensitive axis the adxl001 is an x-axis acceleration and vibration-sensing device. it produces a positive-going output voltage for vibration toward its pin 8 marking. pin 8 07510-002 figure 21. x out increases with acceleration in the positive x-axis direction operating voltages other than 5 v the adxl001 is specified at v s = 3.3 v and v s = 5 v. note that some performance parameters change as the voltage is varied. in particular, the x out output exhibits ratiometric offset and sensitivity with supply. the output sensitivity (or scale factor) scales proportionally to the supply voltage. at v s = 3.3 v, the output sensitivity is typically 16 mv/ g . at v s = 5 v, the output sensitivity is nominally 24.2 mv/ g . x out zero- g bias is nominally equal to v s /2 at all supply voltages. 3.5 3.0 2.5 2.0 1.5 1.0 3.2 3.7 4.2 4.7 5.2 5.7 07510-016 zero- g bias (v) supply voltage (v) high limit low limit nominal zero- g figure 22. typical zero-g bias levels across varying supply voltages self-test response in gravity is roughly proportional to the cube of the supply voltage. for example, the self-test response for the adxl001-70 at v s = 5 v is approximately 1.4 v. at v s = 3.3 v, the self-test response for the adxl001-70 is approximately 400 mv. to calculate the self-test value at any operating voltage other than 3.3 v or 5 v, the following formula can be applied: ( st @ v x ) = (st @ v s ) (v x / v s ) 3 where: v x is the desired supply voltage. v s is 3.3 v or 5 v.
adxl001 rev. a | page 13 of 16 layout, grounding, and by passing considerations clock frequency supply response in any clocked system, power supply noise near the clock frequency may have consequences at other frequencies. an internal clock typically controls the sensor excitation and the signal demodulator for micromachined accelerometers. if the power supply contains high frequency spikes, they may be demodulated and interpreted as acceleration signals. a signal appears at the difference between the noise frequency and the demodulator frequency. if the power supply noise is 100 hz away from the demodulator clock, there is an output term at 100 hz. if the power supply clock is at exactly the same frequency as the accelerometer clock, the term appears as an offset. if the difference frequency is outside the signal bandwidth, the output filter attenuates it. however, both the power supply clock and the accelerometer clock may vary with time or temperature, which can cause the interference signal to appear in the output filter bandwidth. the adxl001 addresses this issue in two ways. first, the high clock frequency, 125 khz for the output stage, eases the task of choosing a power supply clock frequency such that the difference between it and the accelerometer clock remains well outside the filter bandwidth. second, the adxl001 has a fully differential signal path, including a pair of electrically isolated, mechanically coupled sensors. the differential sensors eliminate most of the power supply noise before it reaches the demodulator. good high frequency supply bypassing, such as a ceramic capacitor close to the supply pins, also minimizes the amount of interference. the clock frequency supply response (cfsr) is the ratio of the response at the output to the noise on the power supply near the accelerometer clock frequency or it s harmonics. a cfsr of 0.9 v/v means that the signal at the output is half the amplitude of the supply noise. this is analogous to the power supply rejection ratio (psrr), except that the stimulus and the response are at different frequencies. power supply decoupling for most applications, a single 0.1 f capacitor, c dc , adequately decouples the accelerometer from noise on the power supply. however, in some cases, particularly where noise is present at the 1 mhz internal clock frequency (or any harmonic thereof), noise on the supply can cause interference on the adxl001 output. if additional decoupling is needed, a 50 (or smaller) resistor or ferrite bead can be inserted in the supply line. additionally, a larger bulk bypass capacitor (in the 1 f to 4.7 f range) can be added in parallel to c dc . electromagnetic interference the adxl001 can be used in areas and applications with high amounts of emi or with components susceptible to emi emissions. the fully differential circuitry of the adxl001 is designed to be robust to such interference. for improved emi performance, especially in automotive applications, a 1000 pf output capacitor is recommended on the x out output.
adxl001 rev. a | page 14 of 16 outline dimensions 111808-c bottom view (plating option 1, see detail a for option 2) detail a (option 2) 1 3 5 7 top view 0.075 ref r 0.008 (4 plcs) 0.208 0.197 sq 0.188 0.22 0.15 0.08 (r 4 plcs ) 0.183 0.177 sq 0.171 0.094 0.078 0.062 0.010 0.006 0.002 0.082 0.070 0.058 0.055 0.050 0.045 0.031 0.025 0.019 0.030 0.020 dia 0.010 0.019 sq 0.108 0.100 0.092 r 0.008 (8 plcs) figure 23. 8-terminal cerami c leadless chip carrier [lcc] (e-8-1) dimensions shown in inches ordering guide model 1 temperature range g range package description package option adxl001-70bez ?40c to +125c 70 g 8-terminal lcc e-8-1 adxl001-70bez-r7 ?40c to +125c 70 g 8-terminal lcc e-8-1 ADXL001-250BEZ ?40c to +125c 250 g 8-terminal lcc e-8-1 ADXL001-250BEZ-r7 ?40c to +125c 250 g 8-terminal lcc e-8-1 adxl001-500bez ?40c to +125c 500 g 8-terminal lcc e-8-1 adxl001-500bez-r7 ?40c to +125c 500 g 8-terminal lcc e-8-1 eval-adxl001-250z evaluation board eval-adxl001-500z evaluation board eval-adxl001-70z evaluation board 1 z = rohs compliant part.
adxl001 rev. a | page 15 of 16 notes
adxl001 rev. a | page 16 of 16 notes ?2010 analog devices, inc. all rights reserved. trademarks and registered trademarks are the prop erty of their respective owners. d07510-0-2/10(a)

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